Adel Merdassi
at McGill Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 7 March 2014 Paper
Proc. SPIE. 8973, Micromachining and Microfabrication Process Technology XIX
KEYWORDS: Amorphous silicon, Microsystems, Sensors, Sputter deposition, Capacitance, Transistors, Silicon carbide, Resistors, Californium, Temperature metrology

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