Mr. Defeng Liao Profile

Defeng Liao

at China Academy of Engineering Physics

SPIE Involvement:

Author

Area of Expertise:

optical fabrication , laser induced damage

Publications (11)

Proceedings Article | 13 December 2021 Paper

Suppressing the edge roll off in continuous polishing of large planar optics by using extension blocks

Lele Ren, Feihu Zhang, Defeng Liao, Ruiqing Xie, Shijie Zhao, Jian Wang

Proceedings Volume 12072, 120720L (2021) https://doi.org/10.1117/12.2604437

KEYWORDS: Polishing, Surface finishing, Interfaces, Semiconducting wafers, Polyurethane, Chemical mechanical planarization, Analytical research, Telescopes, Silica, Polishing equipment

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Proceedings Article | 15 November 2019 Presentation + Paper

Particle distribution characterization on material removal uniformity in chemical mechanical polishing

Shijie Zhao, Ruiqing Xie, Defeng Liao, Xianhua Chen, Qinghua Zhang, Jian Wang, Qiao Xu

Proceedings Volume 11175, 111750A (2019) https://doi.org/10.1117/12.2536289

KEYWORDS: Particles, Chemical mechanical planarization, Polishing, Surface finishing, Kinematics, Tin, Abrasives

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Proceedings Article | 10 May 2019 Paper

The properties of zirconia during the fused silica polishing process

Shijie Zhao, Ruiqing Xie, Xianhua Chen, Defeng Liao, Zhigang Yuan, Jian Wang

Proceedings Volume 11068, 110680V (2019) https://doi.org/10.1117/12.2523929

KEYWORDS: Polishing, Zirconium dioxide, Surface finishing, Silica, Particles, Laser damage threshold, Glasses, Cerium, Polyurethane, Oxides

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Proceedings Article | 30 January 2019 Paper

Recent advances in rapid polishing process of large aperture optical flats

Ruiqing Xie, Shijie Zhao, Defeng Liao, Xianhua Chen, Jian Wang, Qiao Xu, Huiying Zhao, Zhuangde Jiang

Proceedings Volume 10841, 108410V (2019) https://doi.org/10.1117/12.2505131

KEYWORDS: Polishing, Surface finishing, Optical components, Silica, Surface roughness, Optics manufacturing, Chemical mechanical planarization, Polyurethane, Particles, High power lasers

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Proceedings Article | 16 January 2019 Paper

A novel method for measuring and correcting the surface shape error of the pitch lap in the full-aperture continuous polishing

Defeng Liao, Ruiqing Xie, Shijie Zhao, Lele Ren, Yiren Wang

Proceedings Volume 10838, 108381A (2019) https://doi.org/10.1117/12.2505902

KEYWORDS: Polishing, Surface finishing, Optical components, Servomechanisms, Polyurethane, Sensors, Diamond, Abrasives, Process control, Motion measurement

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Proceedings Article | 16 January 2019 Paper

Investigation on the compression behavior of polishing lap in continuous polishing

Lele Ren, Feihu Zhang, Defeng Liao, Ruiqing Xie, Shijie Zhao

Proceedings Volume 10838, 108380J (2019) https://doi.org/10.1117/12.2504925

KEYWORDS: Polishing, Interfaces, Computer simulations, Analytical research, Sensors, Photovoltaics, Surface finishing, Mechanics, Mechatronics, Laser welding

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Proceedings Article | 16 January 2019 Paper

Study on the heat deformation rule of optical element in the continuous polishing processing

Yiren Wang, Feihu Zhang, Defeng Liao, Jian Wang, Qiao Xu

Proceedings Volume 10838, 1083807 (2019) https://doi.org/10.1117/12.2504796

KEYWORDS: Optical components, Polishing, Temperature metrology, Surface finishing, Spherical lenses, Glasses, Image quality, Factor analysis

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SPIE Journal Paper | 17 September 2018

Improvement and application of pad conditioning accuracy in chemical mechanical polishing

Xinxing Ban, Huiying Zhao, Xueliang Zhu, Shijie Zhao, Ruiqing Xie, Defeng Liao

OE, Vol. 57, Issue 09, 095102, (September 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.9.095102

KEYWORDS: Polishing, Surface finishing, Chemical mechanical planarization, Diamond, Particles, Optical engineering, Optics manufacturing, Polyurethane, Semiconducting wafers, Silica

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Proceedings Article | 24 July 2018 Paper

Research and progress of rapid polishing technology for large aperture optics

Xinxing Ban, Huiying Zhao, Yawen Gu, Ruiqing Xie, Defeng Liao, Zhuangde Jiang

Proceedings Volume 10827, 108272D (2018) https://doi.org/10.1117/12.2326686

KEYWORDS: Polishing, Surface finishing, Particles, Optical components, Polishing equipment, Optics manufacturing, Polyurethane, Control systems, Chemical mechanical planarization, Diamond

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Proceedings Article | 5 March 2018 Paper

In-situ shape measurement technology during large aperture optical planar continuous polishing process

Ruiqing Xie, Defeng Liao, Jian Chen, Shijie Zhao, Xianhua Chen, Baojian Ji, Jian Wang, Qiao Xu

Proceedings Volume 10710, 1071033 (2018) https://doi.org/10.1117/12.2317629

KEYWORDS: Polishing, Surface finishing, Interferometry, Optics manufacturing, Optical components, Mirrors, Sensors, Interferometers, 3D metrology, Mechanics

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Proceedings Article | 5 March 2018 Paper

Research on high-efficiency polishing technology of photomask substrate

Shijie Zhao, Ruiqing Xie, Lian Zhou, Defeng Liao, Xianhua Chen, Jian Wang

Proceedings Volume 10710, 107102O (2018) https://doi.org/10.1117/12.2314931

KEYWORDS: Polishing, Surface finishing, Photomasks, Glasses, Sensors, Manufacturing, Annealing, Active sensors, Silicon, Diamond

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Showing 5 of 11 publications

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