Mr. Ivan Kissiov Profile

Ivan Kissiov

at Siemens EDA

Publications (4)

Proceedings Article | 28 April 2023 Paper

Design-aware virtual metrology and process recipe recommendation

Nathan Greeneltch, Haizhou Yin, J. Andres Torres, Melody Tao, Steven Lubin, Srividya Jayaram, Ivan Kissiov, Martin Niehoff, Marcus Wolf, Paul Jungmann, Todd Bailey

Proceedings Volume 12495, 124951V (2023) https://doi.org/10.1117/12.2661150

KEYWORDS: Data modeling, Semiconducting wafers, Metrology, Modeling, Machine learning, Fabrication, Data processing, Semiconductors, Process modeling, Deposition processes

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Proceedings Article | 27 April 2023 Paper

AI-guided reliability diagnosis for 5,7nm automotive process

Dongin Kim, Hyung Joo Lee, Sanghyun Choi, Seungpyo Hong, Seungjae Lee, Doohwan Kwak, Srividya Jayaram, Seungwon Paek, Minho Kwon, Yeongdo Kim, Hyobe Jung, Ivan Kissiov, Melody Tao, Andres Torres, Nathan Greeneltch, Ho Lee

Proceedings Volume 12496, 124963J (2023) https://doi.org/10.1117/12.2662880

KEYWORDS: Reliability, Semiconducting wafers, Data modeling, Manufacturing, Fabrication, Semiconductors, Industry, High volume manufacturing, Model-based design, Metrology

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Proceedings Article | 26 May 2022 Paper

Virtual cross metrology: leveraging process sequence for improved process characterization

J. Andres Torres, Ivan Kissiov, Melody Tao, Graham Mueller, Stefan Schueler, Carsten Hartig, Richard Gardner, Srividya Jayaram

Proceedings Volume 12053, 120531B (2022) https://doi.org/10.1117/12.2614943

KEYWORDS: Process modeling, Process control, Metrology, Calibration, Semiconducting wafers, Neodymium, Error analysis, Control systems, Semiconductors, Machine learning

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Proceedings Article | 22 February 2021 Presentation + Paper

Virtual metrology: how to build the bridge between the different data sources

Stefan Schueler, Carsten Hartig, Andres Torres, Ivan Kissiov, Richard Gardner, Essam Mohamed, Srividya Jayaram

Proceedings Volume 11611, 116112D (2021) https://doi.org/10.1117/12.2588467

KEYWORDS: Metrology, Bridges, Manufacturing, Data modeling, Time metrology, Semiconducting wafers, Reticles, Internet, Design for manufacturability, Data integration

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