Ms. Jiani Su Profile

Jiani Su

at Academy of Opto-Electronics CAS

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Author

Publications (8)

Proceedings Article | 24 January 2019 Paper

Non-paraxial diffraction of tiny pinhole illuminated by partially coherent light

Zengxiong Lu, Yuejing Qi, Jiani Su, Qingyang Zhang, Bing Li, Guanghua Yang, Wei Qi

Proceedings Volume 10840, 1084003 (2019) https://doi.org/10.1117/12.2505387

KEYWORDS: Diffraction, Wavefronts, Calibration, Wavefront sensors, Sensors, Projection systems, Lithography, Metrology, Phase measurement, Scanners

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Proceedings Article | 24 January 2019 Paper

Research on micro displacement measurement technology based on chromatic confocal method

Yuejing Qi, Zengxiong Lu, Jing Ma, Guanghua Yang, Qingyang Zhang, Bing Li, Wei Qi, Jiani Su

Proceedings Volume 10840, 108401G (2019) https://doi.org/10.1117/12.2505383

KEYWORDS: Colorimetry, Confocal microscopy, Sensors, Chromatic aberrations, Spectrometers, Calibration, Zemax

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Proceedings Article | 18 January 2019 Paper

The angular measurement of the motion direction of the stack motion platform based on the dual-frequency laser interferometer

Guanghua Yang, Yuejing Qi, Yu Wang, Zengxiong Lu, Jiani Su, Wei Qi, Bing Li

Proceedings Volume 10839, 108390X (2019) https://doi.org/10.1117/12.2505151

KEYWORDS: Interferometers, Motion measurement

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Proceedings Article | 16 January 2019 Paper

Design of digital light processing mini-projection lens

Jiani Su, Yuejing Qi, Yu Wang, Zengxiong Lu, Guanghua Yang, Wei Qi, Bing Li

Proceedings Volume 10838, 108381F (2019) https://doi.org/10.1117/12.2506238

KEYWORDS: Digital Light Processing, Distortion, Lens design, Modulation transfer functions, Digital micromirror devices, Prisms, Monochromatic aberrations, Image quality, Zemax, Micromirrors

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Proceedings Article | 15 March 2016 Paper

Confocal position alignment in high-precision wavefront error metrology using Shack-Hartmann wavefront sensor

Jiani Su, Zengxiong Lu, Yuejing Qi, Guangyi Liu, Qingbin Meng

Proceedings Volume 9780, 97801N (2016) https://doi.org/10.1117/12.2218506

KEYWORDS: Collimators, Wavefront sensors, Inspection, Optical alignment, Lithography, Confocal microscopy, Wavefronts, Metrology, Wavefront reconstruction, Zernike polynomials, Monochromatic aberrations, Sensors

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Proceedings Article | 7 August 2015 Paper

Analysis of the pinhole array illumination source for high precision wavefront error metrology

Zengxiong Lu, Yuejing Qi, Qingbin Meng, Jiani Su, Guangyi Liu

Proceedings Volume 9623, 962302 (2015) https://doi.org/10.1117/12.2191100

KEYWORDS: Wavefronts, Spherical lenses, Metrology, Diffraction, Collimators, Error analysis, Wavefront sensors, Optical testing, Aluminum, Gold

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Proceedings Article | 5 August 2015 Paper

Effect of ambient temperature on the measurement accuracy of Shack-Hartmann wavefront sensor

Qingbin Meng, Yuejing Qi, Zengxiong Lu, Jiani Su

Proceedings Volume 9621, 96210H (2015) https://doi.org/10.1117/12.2193109

KEYWORDS: Wavefronts, Temperature metrology, Wavefront sensors, Wavefront reconstruction, Charge-coupled devices, Zemax, Sensors, Error analysis, Optical fibers, Optical testing

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Proceedings Article | 18 September 2014 Paper

A new illumination source for Shack-Hartmann wavefront sensor

Yuejing Qi, Zengxiong Lu, Gongming Ding, Jiani Su

Proceedings Volume 9282, 928205 (2014) https://doi.org/10.1117/12.2068294

KEYWORDS: Wavefront sensors, Wavefronts, Spherical lenses, Projection systems, Gold, Metrology, Finite-difference time-domain method, Diffraction, Silver, Aluminum

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Showing 5 of 8 publications

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