Jookyoung Song
at SKHynix
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Optical lithography, Atrial fibrillation, Defect detection, Manufacturing, Photomasks, Source mask optimization, Optical proximity correction, Semiconducting wafers, Model-based design

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