Dr. Lei Zhang Profile

Dr. Lei Zhang

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Publications (2)

Proceedings Article | 27 April 2023 Poster + Paper

Large field of view metrology: detecting critical edge placement error signatures not seen with small field of view in an HVM environment

James Park, Abdalmohsen Elmalk, Chih-Hung Hsieh, Alexander Serebryakov, Lei Zhang, Joonsang You, Taekwon Jee, Hong-Goo Lee, Jongmin Park, Jungchan Kim, Sang-Woo Kim, Seungmo Hong, Jaewook Seo, Kuan-Ming Chen, Mohamed Ridane, Ivy Chen, Jaden Song, Peter Nikolsky, Shinyeong Lee, Sean Park, Kolos Lin, Yu-Chi Su, Kyoyeon Cho, Ethan Yu

Proceedings Volume 12496, 124963C (2023) https://doi.org/10.1117/12.2659692

KEYWORDS: Metrology, Semiconducting wafers, High volume manufacturing, Line width roughness, Critical dimension metrology, Scanning electron microscopy, Optical lithography, Environmental sensing, Edge detection, Overlay metrology

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Proceedings Article | 20 March 2018 Paper

In-resist pattern shift metrology

Maikel Goosen, Willem van Mierlo, Wendy Liebregts, Lei Zhang, Bart Rijpers, Anita Bouma, Bart Smeets, Peter de Loijer, Thuy T. Vu

Proceedings Volume 10587, 105871G (2018) https://doi.org/10.1117/12.2304364

KEYWORDS: Overlay metrology, Diffraction, Wavefront aberrations, Optical aberrations

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