Dr. Sébastien Lani
at CSEM SA
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 4 March 2019 Paper
Proc. SPIE. 10931, MOEMS and Miniaturized Systems XVIII
KEYWORDS: Mirrors, Spectrographs, Electrodes, Spectroscopy, Clouds, Microopto electromechanical systems, Micromirrors, Semiconducting wafers, Wafer bonding

Proceedings Article | 25 September 2017 Paper
Proc. SPIE. 10562, International Conference on Space Optics — ICSO 2016
KEYWORDS: Mirrors, Spectrographs, Sensors, Space telescopes, Microopto electromechanical systems, Micromirrors, Digital micromirror devices, Astronomical imaging, Molybdenum, Spectroscopes

Proceedings Article | 20 February 2017 Presentation + Paper
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Sensors, Scanners, Reliability, Position sensors, Electrical breakdown, Piezoresistive sensors

Proceedings Article | 20 February 2017 Presentation + Paper
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Mirrors, Laser therapeutics, Etching, Scanners, Silicon, Endoscopes, Deep reactive ion etching, Wafer bonding

Proceedings Article | 27 February 2015 Paper
Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV
KEYWORDS: Microelectromechanical systems, Mirrors, Sensors, Scanners, Silicon, Resistance, Micromirrors, Position sensors, Piezoresistive sensors, Wheatstone bridges

Showing 5 of 9 publications
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