KEYWORDS: Diamond, Particles, Scanning electron microscopy, Edge detection, Detection and tracking algorithms, Data modeling, Image acquisition, Image processing, Electron microscopes
To measure the radii of curvature (ROC) for micro-accessories in precision and ultra-precision with high accuracy, the
thesis put forward a new technology based on digital images of scanning electron microscope (SEM), in which the
contour line of specimen was attained and the ROC was calculated after data fitting. The Canny edge detection and some
other image processing techniques were successively adopted to extract the edge profile of single diamond particle. Then
a high order polynomial was used in view of the least square law to fit the sampling point coordinates of contour line
nonlinearly. Lastly, the ROC could be computed according to the metric ruler of SEM and the proposed formula. The
measurement result shows that the deviation between the technology and current methods is no more than 10%, as the
magnification rate of SEM, the amount of sampling points on contour line and the order of fitting model are 1200, 80, 20
respectively. Besides, the measurement accuracy can reach a nanometer scale. This research also indicates that it is
suitable for the ROC measurement of non-optical small parts or other micro-accessories with high feasibility and
application value.
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