The influence of polarization state and energy distribution of the incident beam on the spot properties of the super-resolution near-field structure (Super-RENS) disc system for various numerical aperture (NA) of the objective lens is analyzed. According to rigorous vector diffraction theory, the spot properties on the recording layer corresponding to linearly, circularly and radially polarized incident beam are analyzed respectively. The simulation results indicate that, wide spot of the incident beam and high NA of the objective lens are beneficial to obtain sharp spot on the recording layer. Furthermore, the circularly polarized incident beam can generate sharper and more symmetrical spot on the recording layer than that of the radially and the linearly polarized beams. However, by introducing annular aperture illumination, the radially polarized incident beam generates the tightest spot if high annulus ratio is applied.
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