Prof. Xueke Xu Profile

Prof. Xueke Xu

at Shanghai Institute of Optics and Fine Mechanics

SPIE Involvement:

Author

Publications (25)

Proceedings Article | 10 October 2020 Poster + Paper

Study on dwell time compensation method of atmospheric pressure plasma processing

Zhe Wang, Lingqi Wu, Chen Hu, Lunzhe Wu, Bing Peng, Aihuan Dun, Xueke Xu, Xiaolei Zhu

Proceedings Volume 11548, 115481L (2020) https://doi.org/10.1117/12.2573825

KEYWORDS: Atmospheric plasma, Plasma, Diffractive optical elements, High power lasers, Polishing, Chemical analysis, Chemical reactions, Surface finishing, Chemical elements

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Proceedings Article | 31 January 2020 Paper

Removal function and chemical composition of RS-SiC surface processing by atmospheric pressure plasma processing

Li Song, Xueke Xu, Aihuan Dun, Lunzhe Wu, Zhe Wang

Proceedings Volume 11427, 114272I (2020) https://doi.org/10.1117/12.2552352

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Proceedings Article | 21 June 2019 Paper

Wavelength-switchable Fizeau interferometry and its applications

Shijie Liu, Qi Lu, You Zhou, Xueke Xu, Jianda Shao, Zhouling Wu, Jian Chen, Ming Huang

Proceedings Volume 11056, 1105627 (2019) https://doi.org/10.1117/12.2526377

KEYWORDS: Wavefronts, Interferometry, Interferometers, Aspheric lenses, Optical filters, Error analysis, Photovoltaics, Glasses, Optical components, Collimation

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Proceedings Article | 6 February 2019 Paper

Precision manufacturing technology of axicon

Yanchao Zhang, Xueke Xu, Jun Cao, Fulin Wu, Aihuan Dun, Jianda Shao

Proceedings Volume 10842, 1084212 (2019) https://doi.org/10.1117/12.2505900

KEYWORDS: Atmospheric plasma, Polishing, Plasma, Axicons, Surface finishing, Chemical reactions, Atmospheric particles, Optics manufacturing, Mirrors, Chemical species

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Proceedings Article | 30 January 2019 Paper

Research of the mist phenomenon on phosphate glass surface

Jun Cao, Xueke Xu, Yanchao Zhang, Aihuan Dun, Jianda Shao

Proceedings Volume 10841, 1084110 (2019) https://doi.org/10.1117/12.2505899

KEYWORDS: Glasses, Polishing, Surface finishing, Liquids, Light scattering, Chemical elements, Aluminum, Neodymium, Solids

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Proceedings Article | 14 November 2017 Paper

Absolute surface form measurement of large flat optics based on oblique incidence method

Shijie Liu, Longbo Xu, You Zhou, Shi Men, Yunbo Bai, Xueke Xu, Jianda Shao

Proceedings Volume 10448, 104481J (2017) https://doi.org/10.1117/12.2279873

KEYWORDS: Wavefronts, Interferometers, Optical testing, Interferometry, Optical components, Fizeau interferometers, Calibration, High power lasers, Laser systems engineering, Mirrors

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Proceedings Article | 16 October 2017 Paper

Analysis and optimization of surface profile correcting mechanism of the pitch lap in large-aperture annular polishing

Huifang Zhang, Minghong Yang, Xueke Xu, Lunzhe Wu, Weiguang Yang, Jianda Shao

Proceedings Volume 10448, 1044804 (2017) https://doi.org/10.1117/12.2279771

KEYWORDS: Surface finishing, Polishing, Kinematics, Laser development, Interfaces, Control systems

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Proceedings Article | 8 March 2017 Paper

Experimental research of the deterministic controlling process of surface figure in the large-aperture annular polishing

Minghong Yang, Jianda Shao, Xueke Xu, Aihuan Dun, Lunzhe Wu, Yan Zhang, Jun Cao, Yang Zhang, Zhe Wang

Proceedings Volume 10255, 102551G (2017) https://doi.org/10.1117/12.2268116

KEYWORDS: Polishing, Process control, Surface finishing, Glasses, Temperature metrology, Humidity, Control systems, Polishing equipment, Optical components, Monochromatic aberrations

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Proceedings Article | 19 October 2016 Paper

Research progress of large optics in the TMT MOBIE

Shijie Liu, Longbo Xu, You Zhou, Weili Zhang, Qi Lu, Wenlan Gao, Jianguo Wang, Zhaoyang Wei, Xueke Xu, Hongbo He, Jianda Shao

Proceedings Volume 10154, 1015429 (2016) https://doi.org/10.1117/12.2247534

KEYWORDS: Optics manufacturing, Optical metrology

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Proceedings Article | 30 June 2016 Paper

Numerical simulation of pitch button blocking optimization

Lunzhe Wu, Wenlan Gao, Aihuan Dun, Minghong Yang, Chaoyang Wei, Xueke Xu, Jianda Shao

Proceedings Volume 10009, 1000911 (2016) https://doi.org/10.1117/12.2236356

KEYWORDS: Finite element methods, Numerical simulations, Polishing, Photovoltaics, Surface finishing, Stress analysis, Materials science, Mechanics, Roads, Thermal modeling

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Proceedings Article | 12 October 2015 Paper

The simulation of workpieces' surface in polishing

Lunzhe Wu, Xueke Xu, Minghong Yang, Chaoyang Wei, Shijie Liu, Jianda Shao

Proceedings Volume 9633, 96332P (2015) https://doi.org/10.1117/12.2218456

KEYWORDS: Polishing, Photovoltaics, Surface finishing, Superposition, Roads, Mechanics, Optical components, Scientific research, Astronomical imaging, Mechanical efficiency

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Proceedings Article | 12 October 2015 Paper

Polishing performances of different optics with different size powder and different pH value slurries during CMP polishing

Jun Cao, Chaoyang Wei, Shijie Liu, Aihuan Dun, Minghong Yang, Xueke Xu, Jianda Shao

Proceedings Volume 9633, 96332O (2015) https://doi.org/10.1117/12.2218455

KEYWORDS: Glasses, Polishing, Surface finishing, Silica, Particles, Ions, Silicon, Chemical mechanical planarization, Silicate glass, Interferometers

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Proceedings Article | 27 August 2015 Paper

The effect of HF etching on the surface quality and figure of fused silica optics

Jiafeng Xu, Xueke Xu, Chaoyang Wei, Wenlan Gao, Minghong Yang, Jianda Shao, Shijie Liu

Proceedings Volume 9575, 95750P (2015) https://doi.org/10.1117/12.2189079

KEYWORDS: Etching, Silica, Surface finishing, Surface roughness, Polishing, Photovoltaics, HF etching, Optics manufacturing, Lamps, Microscopes

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Proceedings Article | 27 August 2015 Paper

Correction of mid-spatial-frequency errors by smoothing in spin motion for CCOS

Yizhong Zhang, Chaoyang Wei, Jianda Shao, Xueke Xu, Shijie Liu, Chen Hu, Haichao Zhang, Haojin Gu

Proceedings Volume 9575, 95750D (2015) https://doi.org/10.1117/12.2189050

KEYWORDS: Polishing, Aspheric lenses, Surface finishing, Mathematical modeling, Polyurethane, Motion models, Magnetorheological finishing, Optical components, Spatial frequencies, Interfaces

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Proceedings Article | 27 August 2015 Paper

Influence of temperature difference on surface figure controlling during continuous polishing

Meijuan Hong, Xueke Xu, Aihuan Dun, Minghong Yang, Wenlan Gao, Chaoyang Wei, Shijie Liu, Jianda Shao, Yang Zhang

Proceedings Volume 9575, 95750S (2015) https://doi.org/10.1117/12.2189142

KEYWORDS: Polishing, Temperature metrology, Surface finishing, Photovoltaics, Ions, Infrared imaging, Thermography, Infrared radiation, Imaging systems, Aluminum

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Proceedings Article | 22 September 2014 Paper

The figure simulation of the polishing pad in the continuous polishing process

Haiyang Shan, Xueke Xu, Hongbo He, Shijie Liu, Chaoyang Wei, Kui Yi, Jianda Shao

Proceedings Volume 9238, 92380G (2014) https://doi.org/10.1117/12.2073492

KEYWORDS: Polishing, Calibration, Temperature metrology, Laser glasses, High power lasers, Oxygen, Finite element methods, Abrasives, Optical simulations, Mechanics

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Proceedings Article | 6 August 2014 Paper

Subsurface damage on ground fused silica surfaces

Jiafeng Xu, Xueke Xu, Wenlan Gao, Chaoyang Wei, Minghong Yang, Jianda Shao

Proceedings Volume 9281, 92810M (2014) https://doi.org/10.1117/12.2069746

KEYWORDS: Abrasives, Particles, Silica, Surface finishing, Optics manufacturing, Surface roughness, Magnetorheological finishing, Polishing, Microscopes, Laser induced damage

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Proceedings Article | 6 August 2014 Paper

The real-time monitoring surface figure of optical elements in continuous polishing

Jun Chen, Xueke Xu, Chaoyang Wei, Jianxun Gu, Aihuan Dun, Jianda Shao

Proceedings Volume 9281, 92810L (2014) https://doi.org/10.1117/12.2069754

KEYWORDS: Surface finishing, Polishing, Computing systems, Interferometers, Photovoltaics, Optical components, Glasses, Mirrors, Wavefronts, Optics manufacturing

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Proceedings Article | 15 October 2013 Paper

Effect of polishing plane vibration on large-size optical workpieces in continuous polishing

Haiyang Shan, Chaoyang Wei, Xueke Xu, Hongbo He, Shijie Liu, Yingfeng Li, Kui Yi, Jianda Shao

Proceedings Volume 8884, 88841S (2013) https://doi.org/10.1117/12.2032540

KEYWORDS: Polishing, Polishing equipment, Vibration simulation, Surface finishing, Glasses, Photovoltaics, Optical components, Computer simulations, Monochromatic aberrations, Optics manufacturing

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Proceedings Article | 9 July 2013 Paper

Annular polishing of large-aperture Nd-doped metaphosphate glasses

Haiyang Shan, Xueke Xu, Hongbo He, Fulin Wu, Kui Yi, Jianda Shao

Proceedings Volume 8786, 87861S (2013) https://doi.org/10.1117/12.2019760

KEYWORDS: Polishing, Glasses, Monochromatic aberrations, Wavefronts, Surface finishing, Interferometers, Image processing, Photovoltaics, Image transmission, High power lasers

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SPIE Journal Paper | 28 May 2013

Reaction mechanism and the effects of additives on the polishing of phosphate laser glass

Haiyang Shan, Xueke Xu, Hongbo He, Kui Yi, Jianda Shao

OE, Vol. 52, Issue 05, 053402, (May 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.5.053402

KEYWORDS: Polishing, Laser glasses, Surface finishing, Glasses, Surface roughness, Chemical reactions, Particles, Lanthanum, Cerium, Ions

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SPIE Journal Paper | 1 February 2006

Design and fabrication of color filters for projection display system

Xueke Xu, Jianda Shao, Zhengxiu Fan

OE, Vol. 45, Issue 02, 023801, (February 2006) https://doi.org/10.1117/12.10.1117/1.2167086

KEYWORDS: Optical filters, Transmittance, Refractive index, Interfaces, Displays, Optical engineering, Fluctuations and noise, Digital filtering, Thermography, Statistical analysis

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Proceedings Article | 26 January 2006 Paper

Design and fabrication of color filters for projection display system

Xueke Xu, Jianda Shao, Zhengxiu Fan

Proceedings Volume 6030, 603009 (2006) https://doi.org/10.1117/12.667365

KEYWORDS: Optical filters, Transmittance, Refractive index, Interfaces, Displays, Thin films, Thermography, LCDs, Annealing, Tolerancing

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Proceedings Article | 8 December 2004 Paper

The study on the interface adhesion comparison of MgF2, Al2O3, SiO2, and Ag thin films

Xueke Xu, Zhaosheng Tang, Jian Da Shao, Zhengxiu Fan

Proceedings Volume 5774, (2004) https://doi.org/10.1117/12.607552

KEYWORDS: Silver, Aluminum, Interfaces, Thin film coatings, Thin films, Optical coatings, Magnesium fluoride, Refractive index, Humidity, Reflectivity

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SPIE Journal Paper | 1 April 2004

Effect of chromium intermediate layer on properties of silver coatings

Xueke Xu, Zhaosheng Tang, ZhengXiu Fan, Jianda Shao

OE, Vol. 43, Issue 04, (April 2004) https://doi.org/10.1117/12.10.1117/1.1646409

KEYWORDS: Silver, Chromium, Reflectivity, Sputter deposition, Glasses, Humidity, Optical coatings, Argon, Thin films, Metals

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Showing 5 of 25 publications

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