Mr. Yu Cheng Profile

Yu Cheng

at Soochow Univ

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Author

Publications (3)

Proceedings Article | 7 March 2014 Paper

Fabrication of the nanoimprint template with periodic structures

Quan Liu, Jianhong Wu, Yu Cheng

Proceedings Volume 8974, 89741C (2014) https://doi.org/10.1117/12.2039584

KEYWORDS: Etching, Nanoimprint lithography, Ion beams, Photoresist materials, Reactive ion etching, Holography, Photomasks, Lithography, Nanolithography, Photoresist developing

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Proceedings Article | 21 December 2013 Paper

The fabrication of the holographic dual-blazed grating

Quan Liu, Jianhong Wu, Minghui Chen, Yu Cheng

Proceedings Volume 9047, 90470F (2013) https://doi.org/10.1117/12.2036785

KEYWORDS: Diffraction gratings, Diffraction, Etching, Holography, Ion beams, Photomasks, Photoresist materials, Infrared radiation, Reactive ion etching, Optical design

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Proceedings Article | 21 December 2013 Paper

Groove profile modification of convex blazed gratings by dip (spin) coating with photoresist

Yu Cheng, Quan Liu, Jianhong Wu

Proceedings Volume 9047, 90470C (2013) https://doi.org/10.1117/12.2036521

KEYWORDS: Coating, Photoresist materials, Spectroscopy, Holography, Diffraction gratings, Ion beams, Liquids, Diffraction, Imaging systems, Etching

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