Metallic microdots patterning with laser-induced forward transfer

Haruki Kawaguchi; Kanta Takahashi; Rong Wei; Keisaku Yamane; Ryuji Morita; Ken-ichi Yuyama; Satoyuki Kawano; Katsuhiko Miyamoto; Nobuyuki Aoki; Takashige Omatsu

doi:10.1117/12.2651259

17 March 2023 Metallic microdots patterning with laser-induced forward transfer

Haruki Kawaguchi, Kanta Takahashi, Rong Wei, Keisaku Yamane, Ryuji Morita, Ken-ichi Yuyama, Satoyuki Kawano, Katsuhiko Miyamoto, Nobuyuki Aoki, Takashige Omatsu

Author Affiliations +

Proceedings Volume PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; PC124080H (2023) https://doi.org/10.1117/12.2651259
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

This presentation was prepared for SPIE LASE 2023.

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Haruki Kawaguchi, Kanta Takahashi, Rong Wei, Keisaku Yamane, Ryuji Morita, Ken-ichi Yuyama, Satoyuki Kawano, Katsuhiko Miyamoto, Nobuyuki Aoki, and Takashige Omatsu "Metallic microdots patterning with laser-induced forward transfer", Proc. SPIE PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, PC124080H (17 March 2023); https://doi.org/10.1117/12.2651259

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