Presentation
9 March 2024 Surface proximal color centers in SiC: deterministic creation and emission enhancement
Xiuling Li
Author Affiliations +
Abstract
Optically active defects in wide band-gap semiconductors are a leading candidate for use as ultra high-sensitivity quantum sensors of strain as well as electric and magnetic fields. The availability of large size substrates, mature epitaxial growth and fabrication techniques, and excellent optical and electrical properties make silicon carbide (SiC) attractive, in comparison to diamond, for fully integrated and electrically controllable quantum magnetometers. We present high brightness and sensitivity of ensemble surface proximal defects deterministically generated within porous silicon carbide produced by a damage-free metal-assisted chemical etching method.
Conference Presentation
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiuling Li "Surface proximal color centers in SiC: deterministic creation and emission enhancement", Proc. SPIE PC12895, Quantum Sensing and Nano Electronics and Photonics XX, PC1289516 (9 March 2024); https://doi.org/10.1117/12.3001747
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KEYWORDS
Silicon carbide

Wet etching

Color centers

Lithium

Porosity

Quantum enhancement

Quantum magnetometry

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