Precision Focus Control

Burton D. Figler

doi:10.1117/12.956511

8 August 1978 Precision Focus Control

Burton D. Figler

Proceedings Volume 0141, Adaptive Optical Components I; (1978) https://doi.org/10.1117/12.956511
Event: 1978 Technical Symposium East, 1978, Washington, D.C., United States

Abstract

The operational limitation on many high-resolution optical systems and, in particular, on high-resolution microdensitometers, is determined by the system's ability to establish and hold critical focus under dynamic conditions . A precision focus control, utilizing pneumatic actuation and feedback, is described which provides the needed dynamic focusing to permit the acievement of submicron optical resolution. This focus control system, although initially designed as an integral subsystem of the Aerodyne Linear Microdensitometer, has been incorporated as an add-on to PDS 1050 Microdensitometers and to the David Mann 10-47 Microdensitometer. The Precision Focus Control, in its standard configuration, has provided focusing accuracy to better than ±0.5 µm at disturbance frequencies to 10 Hz. The set focus position can be varied from slightly above the target surface to 25 µm below the target surface, while focus can be maintained over a range of surface variations of more than 1.5 mm. Because of the pneumatic pressure reacting against the object surface, local film hold-down is automatically provided without any mechanical contact of the object surface. Object thicknesses of up to 6 mm can be accommodated.

Citation Download Citation

Burton D. Figler "Precision Focus Control", Proc. SPIE 0141, Adaptive Optical Components I, (8 August 1978); https://doi.org/10.1117/12.956511

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KEYWORDS

Servomechanisms

Actuators

Objectives

Control systems

Optical components

Modulation

Control systems design

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