Technique For Quantitative Analysis Of Specimen Microtopography Using Computer Control Of A Scanning Electron Microscope

David M. Holburn

doi:10.1117/12.934322

29 March 1983 Technique For Quantitative Analysis Of Specimen Microtopography Using Computer Control Of A Scanning Electron Microscope

David M. Holburn

Author Affiliations +

Proceedings Volume 0368, Microscopy: Techniques and Capabilities; (1983) https://doi.org/10.1117/12.934322
Event: Microscopy-Techniques and Capabilities, 1982, London, United Kingdom

Abstract

An automated method for quantitative determination of specimen topography is described in which a computer-controlled range finding technique is employed to measure the distance between the objective lens of a scanning electron microscope (SEM) and a set of distinct features on the specimen surface. Computations based on the spatial derivative of the image intensity allow the objective lens setting corresponding to the optimum focus for each feature to be determined, and this can be related to the feature height. Experimental results and theoretical analysis indicate that the sensitivity for discrimination of height differences is of the order of 1μm.

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David M. Holburn "Technique For Quantitative Analysis Of Specimen Microtopography Using Computer Control Of A Scanning Electron Microscope", Proc. SPIE 0368, Microscopy: Techniques and Capabilities, (29 March 1983); https://doi.org/10.1117/12.934322

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