High Precision Angle Measurements Off Small Surfaces

Russell A. Chipman

doi:10.1117/12.936353

15 November 1983 High Precision Angle Measurements Off Small Surfaces

Russell A. Chipman

Proceedings Volume 0429, Precision Surface Metrology; (1983) https://doi.org/10.1117/12.936353
Event: 27th Annual Technical Symposium, 1983, San Diego, United States

Abstract

A method is described for measuring the orientation of small plane surfaces several tens of micrometers on a side with a resolution of several seconds of arc. A laser beam waist is located on the test surface which underfills the surface. The reflected beam is detected by a quadrant detector to determine the offset of the beam from its nominal position. This displacement determines the relative angular difference from a predetermined angular standard. Advantages of this method for precise angle determination are the ability to measure small surfaces, insensitivity to translations of the test piece, large test piece clearance for inaccessible surfaces, and compensation for laser drift.

Citation Download Citation

Russell A. Chipman "High Precision Angle Measurements Off Small Surfaces", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); https://doi.org/10.1117/12.936353

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available