Comparison Of Roughness Measurements By Differential Scatter And Total Integrated Scatter

John C. Stover; Bahram Hourmand; Jeffrey A. Kahler; Calvin H. Gillespie

doi:10.1117/12.945027

17 January 1985 Comparison Of Roughness Measurements By Differential Scatter And Total Integrated Scatter

John C. Stover, Bahram Hourmand, Jeffrey A. Kahler, Calvin H. Gillespie

Proceedings Volume 0511, Stray Radiation IV; (1985) https://doi.org/10.1117/12.945027
Event: 28th Annual Technical Symposium, 1984, San Diego, United States

Abstract

This paper discusses the problems involved in comparing the rms roughness values obtained from a plane of incidence differential scatterometer to those obtained from a TIS system. The theoretical justification for making the comparison and the importance of spatial frequency bandwidths are reviewed first. The two types of instruments are briefly described and referenced. Several practical problems relating to the types of samples that allow the comparison are presented. The comparison is independent of the surface height distribution (i.e., a Gaussian astribution is not required); however, because the data is taken in one plane only by the differential scatterometer only isotropic samples, one dimensional samples (grating like) or a combination of the two may be used to make the comparison. Then two less obvious mechanisms associated with TIS devices are discussed. These are the small angle scatter assumption and the angle of incidence variation at the detector. Both of these effects act to discriminate against high frequency roughness in the calculation of rms roughness from TIS data. Finally, some experimental comparisons of several samples are presented.

Citation Download Citation

John C. Stover, Bahram Hourmand, Jeffrey A. Kahler, and Calvin H. Gillespie "Comparison Of Roughness Measurements By Differential Scatter And Total Integrated Scatter", Proc. SPIE 0511, Stray Radiation IV, (17 January 1985); https://doi.org/10.1117/12.945027

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