The Characterization And Simulation Of Spin-Coated Resist Contours

L. K. White

doi:10.1117/12.947811

18 April 1985 The Characterization And Simulation Of Spin-Coated Resist Contours

L. K. White

Proceedings Volume 0539, Advances in Resist Technology and Processing II; (1985) https://doi.org/10.1117/12.947811
Event: 1985 Microlithography Conferences, 1985, Santa Clara, United States

Abstract

A method of characterizing and simulating spun-on resist coating contours is described. A low-pass frequency filter is applied to the uncoated contour (topography). Two parameters, P. and a, describe the low-pass frequency filters that estimate the coating contours of different spun-on solutions. The frequency filter parameters are derived solely from step-height measurements of coated isolated-line features. Radial flow-induced coating anomalies are also discussed. These anomalies produce different coating contours for features at different orientations and positions with respect to the centrifugal center of the substrate. A simulated coating contour on a three-dimensional device structure is presented to show the typical thickness changes produced by spun-on positive resist films. A correction for film shrinkage is sometimes required for this simulation procedure.

Citation Download Citation

L. K. White "The Characterization And Simulation Of Spin-Coated Resist Contours", Proc. SPIE 0539, Advances in Resist Technology and Processing II, (18 April 1985); https://doi.org/10.1117/12.947811

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available