Experience With The In Situ Monitor System For The Fabrication Of X-Ray Mirrors

Eberhard Spiller

doi:10.1117/12.949689

6 May 1985 Experience With The In Situ Monitor System For The Fabrication Of X-Ray Mirrors

Eberhard Spiller

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949689
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

Practical consideration for the fabrication of multilayer x-ray mirrors using in situ monitoring of the reflectivity for soft x-rays during deposition are discussed.

Citation Download Citation

Eberhard Spiller "Experience With The In Situ Monitor System For The Fabrication Of X-Ray Mirrors", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949689

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