A Phase Sensitive Scanning Optical Microscope

P. C. D. Hobbs; R. L. Jungerrran; G. S. Kino

doi:10.1117/12.949734

2 January 1986 A Phase Sensitive Scanning Optical Microscope

P. C. D. Hobbs, R. L. Jungerrran, G. S. Kino

Proceedings Volume 0565, Micron and Submicron Integrated Circuit Metrology; (1986) https://doi.org/10.1117/12.949734
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

We describe a new type of electronically-scanned confocal optical microscope which is very well suited to surface metrology. A laser beam incident on a wideband Te0₂ Bragg cell produces both a stationary beam which is used as a local phase reference and a scanned beam which is frequency-shifted; these are used in an AC interferometer. The system produces an RF output whose amplitude is that of the scanned beam, and whose phase is the optical phase difference of the two beams. Optical phase and amplitude can then be measured separately with standard RF techniques. Phase accuracy is about 10 . Transverse edge resolution (10%-90%) of 230 nm has been obtained (with λ = 514.5 nm) , which is in good agreement with the prediction of the simple theory. The data has been deconvolved to enhance the edge resolution, resulting in an ultimate resolution of 130 nm at the expense of introducing ripple into the edge response.

Citation Download Citation

P. C. D. Hobbs, R. L. Jungerrran, and G. S. Kino "A Phase Sensitive Scanning Optical Microscope", Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); https://doi.org/10.1117/12.949734

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