Paper
22 January 1987 X-Ray System For Electronics Process Verification
Robert A. Kuntz
Author Affiliations +
Proceedings Volume 0728, Optics, Illumination, and Image Sensing for Machine Vision; (1987) https://doi.org/10.1117/12.937826
Event: Cambridge Symposium_Intelligent Robotics Systems, 1986, Cambridge, MA, United States
Abstract
X-ray is used in many different ways in a broad variety of industries within our world today. It is used on almost everything from human beings to very large steel structures.
© (1987) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert A. Kuntz "X-Ray System For Electronics Process Verification", Proc. SPIE 0728, Optics, Illumination, and Image Sensing for Machine Vision, (22 January 1987); https://doi.org/10.1117/12.937826
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KEYWORDS
X-rays

Cameras

Inspection

Electronics

Machine vision

Nanolithography

Process control

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