Accuracy Analysis And Improvements To The Hewlett-Packard Laser Interferometer System

C. Steinmetz; R. Burgoon; J. Herris

doi:10.1117/12.941757

23 March 1987 Accuracy Analysis And Improvements To The Hewlett-Packard Laser Interferometer System

C. Steinmetz, R. Burgoon, J. Herris

Proceedings Volume 0816, Interferometric Metrology; (1987) https://doi.org/10.1117/12.941757
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

An account is given on how to analyze the measurement accuracy of a laser interferometer system. Each component of the system accuracy budget is discussed, including the magnitude of these components. Two important components of this budget; atmospheric affects and optics thermal drift are discussed in more detail. The effects of these two error components have been significantly reduced on the Hewlett-Packard laser interferometer systems by the use of Wavelength Tracking Compensation and a new interferometer.

Citation Download Citation

C. Steinmetz, R. Burgoon, and J. Herris "Accuracy Analysis And Improvements To The Hewlett-Packard Laser Interferometer System", Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); https://doi.org/10.1117/12.941757

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