Bench Evaluation Of Lithographic Lenses From Measurements Of The Point Spread Function

Norman Bobroff; Petra Fadi; Alan E. Rosenbluth; Douglas S. Goodman

doi:10.1117/12.968435

1 January 1988 Bench Evaluation Of Lithographic Lenses From Measurements Of The Point Spread Function

Norman Bobroff, Petra Fadi, Alan E. Rosenbluth, Douglas S. Goodman

Proceedings Volume 0922, Optical/Laser Microlithography; (1988) https://doi.org/10.1117/12.968435
Event: Santa Clara Symposium on Microlithography, 1988, Santa Clara, CA, United States

Abstract

Image quality criteria derived from the point spread function (PSF) are useful for testing lithographic lenses. The Strehl ratio (SR) is a particularly simple and powerful measure of lens quality which is readily accessible from measurements of the PSF. The SR correlates well with traditional figures of merit such as the mean square wavefront aberration and the modulation transfer function. For object dimensions on the order of X/NA, the SR is a direct measure of the field dependent variation of exposure dose caused by lens aberrations. In this sense, the SR connects the lens quality to the final pattern definition in the image recording medium. Experimental aspects of the PSF measurement are emphasized. The lens test bench used to measure the value of the SR through focus and with field position is described. Data showing the PSF, and the field and focus dependence of the SR, are presented for high resolution Hg I-line and G-line lenses.

Citation Download Citation

Norman Bobroff, Petra Fadi, Alan E. Rosenbluth, and Douglas S. Goodman "Bench Evaluation Of Lithographic Lenses From Measurements Of The Point Spread Function", Proc. SPIE 0922, Optical/Laser Microlithography, (1 January 1988); https://doi.org/10.1117/12.968435

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available