Biosensing characteristics of InAs nanowire transistors grown by MOCVD

Doo Gun Kim; Jeongwoo Hwang; Seon Hoon Kim; Hyun Chul Ki; Tae Un Kim; Jae Cheol Shin; Young Wan Choi

doi:10.1117/12.2253637

23 February 2017 Biosensing characteristics of InAs nanowire transistors grown by MOCVD

Doo Gun Kim, Jeongwoo Hwang, Seon Hoon Kim, Hyun Chul Ki, Tae Un Kim, Jae Cheol Shin, Young Wan Choi

Proceedings Volume 10114, Quantum Dots and Nanostructures: Growth, Characterization, and Modeling XIV; 1011416 (2017) https://doi.org/10.1117/12.2253637
Event: SPIE OPTO, 2017, San Francisco, California, United States

Abstract

We demonstrated the ion-sensitive field-effect transistors (IS-FETs) based on nanowires (NWs) with different diameters and doping concentrations to obtain the high sensitivity and various applications. The growth of the catalyst-free InAs NWs was carried out using a horizontal reactor MOCVD system (AIXTRON Inc.). A p-type Si (111) wafer (ρ = 1 -10 Ω-cm) was prepared for the NW growth. Here, NWs with diameters of around 50 ~ 150 nm were grown and the doping concentration also was changed around x±10^16~18 /cm². IS-FETs with the grown InAs NWs were fabricated using the photolithography and the lift-off process. The gas sensing characteristics have been investigated through studying the gate response of the NW conductance in different ambient conditions.

Citation Download Citation

Doo Gun Kim, Jeongwoo Hwang, Seon Hoon Kim, Hyun Chul Ki, Tae Un Kim, Jae Cheol Shin, and Young Wan Choi "Biosensing characteristics of InAs nanowire transistors grown by MOCVD", Proc. SPIE 10114, Quantum Dots and Nanostructures: Growth, Characterization, and Modeling XIV, 1011416 (23 February 2017); https://doi.org/10.1117/12.2253637

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available