Selective surface smoothening of 3D micro-optical elements

Helmut Schift; Nachiappan Chidambaram; Mirco Altana; Robert Kirchner

doi:10.1117/12.2256358

21 March 2017 Selective surface smoothening of 3D micro-optical elements

Helmut Schift, Nachiappan Chidambaram, Mirco Altana, Robert Kirchner

Proceedings Volume 10144, Emerging Patterning Technologies; 101440B (2017) https://doi.org/10.1117/12.2256358
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

We have established a non-contact polishing process for thermoplastic, polymeric microlenses and –prisms with dimensions of up to 50 μm, including sharp convex tips and rims with sub-μm details. The required 3D master structures were fabricated using direct laser-writing lithography with two-photon absorption. Master structures were replicated into poly(methyl methacrylate) through a poly(dimethyl siloxane) intermediate copying step and exposed with 172 nm UV light. Due to the reduction of glass transition temperature in a surface-confined layer, roughness in the range of more than 100 nm could subsequently be smoothed-out to below 10 nm by annealing the surface by heating.

Conference Presentation

Citation Download Citation

Helmut Schift, Nachiappan Chidambaram, Mirco Altana, and Robert Kirchner "Selective surface smoothening of 3D micro-optical elements", Proc. SPIE 10144, Emerging Patterning Technologies, 101440B (21 March 2017); https://doi.org/10.1117/12.2256358

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