The microstructure measurement of surface defects of optical component based on digital image-plane holographic microscopy

Zhu Chen; Hongzhen Jiang; Xu Liu; Fanglan Zheng; Dong Li; Yong Liu; Bo Chen; Xiaoyu Yang

doi:10.1117/12.2247384

19 October 2016 The microstructure measurement of surface defects of optical component based on digital image-plane holographic microscopy

Zhu Chen, Hongzhen Jiang, Xu Liu, Fanglan Zheng, Dong Li, Yong Liu, Bo Chen, Xiaoyu Yang

Author Affiliations +

Proceedings Volume 10155, Optical Measurement Technology and Instrumentation; 101553H (2016) https://doi.org/10.1117/12.2247384
Event: International Symposium on Optoelectronic Technology and Application 2016, 2016, Beijing, China

Abstract

In order to measure the three-dimensional microstructure of surface defects on optical component, a novel measuring method based on digital image-plane holographic microscopy (DIPHM) is proposed in this paper. The experimental system has been designed and built to measure the microstructure of optical component’s surface defects. The object light wavefront can be reconstructed by using the algorithm based on the angular spectrum theory, and the technique of phase correction is contributive to eliminate the system error. There is a definite relationship between the object light wavefront and the surface topography, so the 3D microstructure of surface defects can be measured. This measuring technique is helpful to judge the damage degree of the optical component and analysis the influence of the surface defects, and it is of great significance to ensure the laser system security running.

Citation Download Citation

Zhu Chen, Hongzhen Jiang, Xu Liu, Fanglan Zheng, Dong Li, Yong Liu, Bo Chen, and Xiaoyu Yang "The microstructure measurement of surface defects of optical component based on digital image-plane holographic microscopy", Proc. SPIE 10155, Optical Measurement Technology and Instrumentation, 101553H (19 October 2016); https://doi.org/10.1117/12.2247384

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