3D simulation of silicon micro-ring resonator with Comsol

S. A. Degtyarev; V. V. Podlipnov; Payal Verma; S. N. Khonina

doi:10.1117/12.2266783

30 December 2016 3D simulation of silicon micro-ring resonator with Comsol

S. A. Degtyarev, V. V. Podlipnov, Payal Verma, S. N. Khonina

Proceedings Volume 10224, International Conference on Micro- and Nano-Electronics 2016; 102241L (2016) https://doi.org/10.1117/12.2266783
Event: The International Conference on Micro- and Nano-Electronics 2016, 2016, Zvenigorod, Russian Federation

Abstract

In this paper we provide 3d full-vector static electromagnetic simulation of silicon micro-ring resonator operating. We show that geometrical and scalar approaches are not sufficiently accurate for calculating resonator parameters. Quite strong dependence of ring resonator radius on waveguide width is revealed.

Citation Download Citation

S. A. Degtyarev, V. V. Podlipnov, Payal Verma, and S. N. Khonina "3D simulation of silicon micro-ring resonator with Comsol", Proc. SPIE 10224, International Conference on Micro- and Nano-Electronics 2016, 102241L (30 December 2016); https://doi.org/10.1117/12.2266783

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