Fourier modal method for two-dimensional wavefront reconstruction

Peiying Liang; Jianping Ding; Jianpei Xia; Yuhua Huang; Hui Cao

doi:10.1117/12.2257884

28 February 2017 Fourier modal method for two-dimensional wavefront reconstruction

Peiying Liang, Jianping Ding, Jianpei Xia, Yuhua Huang, Hui Cao

Proceedings Volume 10256, Second International Conference on Photonics and Optical Engineering; 1025642 (2017) https://doi.org/10.1117/12.2257884
Event: Second International Conference on Photonics and Optical Engineering, 2016, Xi'an, China

Abstract

This paper introduces a new way of two-dimensional wavefront reconstruction based on the Fourier modal method. Expending the target wavefront by using Fourier series, calculating the expansion coefficient based on the differential phase measured from the experiment, and fitting the coefficients at the missing points by averaging adjacent values, the target wavefront could be reconstructed eventually by using inverse Fourier transform on the expansion coefficients. The paper also introduces our numerical simulation study on the precisions of both the wavefront reconstruction under ideal situation and under the situation with simulated noise respectively. Corresponding verification experiment for the two-dimensional wavefront reconstruction based on the Fourier modal method is also done by using a two-grating lateral shearing interferometry system, with the 3D profile of the sample obtained.

Citation Download Citation

Peiying Liang, Jianping Ding, Jianpei Xia, Yuhua Huang, and Hui Cao "Fourier modal method for two-dimensional wavefront reconstruction", Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 1025642 (28 February 2017); https://doi.org/10.1117/12.2257884

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