Comparative micro-indentation and dislocation activity in silicon and CaF2: a model

Qin Zhang; John C. Lambropoulos

doi:10.1117/12.605858

2 May 2005 Comparative micro-indentation and dislocation activity in silicon and CaF₂: a model; Technical Digest

Qin Zhang, John C. Lambropoulos

Proceedings Volume 10315, Optifab 2005: Technical Digest; 1031513 (2005) https://doi.org/10.1117/12.605858
Event: Optifab 2005, 2005, Rochester, NY, United States

Abstract

The indentation micro-mechanical response of Silicon and CaF₂ are studied and compared by using 3D finite element simulation. The effects of elastic anisotropy and crystallographic symmetry on contact profile, indentation modulus, and dislocation nucleation underneath a spherical indenter are investigated.

Citation Download Citation

Qin Zhang and John C. Lambropoulos "Comparative micro-indentation and dislocation activity in silicon and CaF₂: a model; Technical Digest", Proc. SPIE 10315, Optifab 2005: Technical Digest, 1031513 (2 May 2005); https://doi.org/10.1117/12.605858

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