On-axis, non-contact measurement of glass thicknesses and airgaps in optical systems with submicron accuracy

Rainer Wilhelm; Alain Courteville; Fabrice Garcia; François de Vecchi

doi:10.1117/12.723546

14 May 2007 On-axis, non-contact measurement of glass thicknesses and airgaps in optical systems with submicron accuracy

Rainer Wilhelm, Alain Courteville, Fabrice Garcia, François de Vecchi

Author Affiliations +

Proceedings Volume 10316, Optifab 2007: Technical Digest; 103160X (2007) https://doi.org/10.1117/12.723546
Event: Optifab 2007, 2007, Rochester, New York, United States

Abstract

This technical summary presents the ﬁber-optics interferometric sensor LISE and its applications in the optics industry. The summary explains the measurement principle (Section 1), describes the hardware system components (Section 2) and gives results of an experimental accuracy validation (Section 3). Section 4 illustrates the application of the sensor as a metrology tool for optics manufacturing.

Citation Download Citation

Rainer Wilhelm, Alain Courteville, Fabrice Garcia, and François de Vecchi "On-axis, non-contact measurement of glass thicknesses and airgaps in optical systems with submicron accuracy", Proc. SPIE 10316, Optifab 2007: Technical Digest, 103160X (14 May 2007); https://doi.org/10.1117/12.723546

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available