Measurement, certification and use of step-height calibration specimens in optical metrology

Peter de Groot; Danette Fitzgerald

doi:10.1117/12.2269800

26 June 2017 Measurement, certification and use of step-height calibration specimens in optical metrology

Peter de Groot, Danette Fitzgerald

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 1032919 (2017) https://doi.org/10.1117/12.2269800
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

Calibration, adjustment and verification of surface topography measuring instruments are important tasks, often facilitated by precision step-height specimens that have been calibrated using traceable metrology such as interferometry. Although standardized procedures for calculating parameters of the step-height are available for line profiling contact stylus systems, there is inconsistent guidance as to how to interpret step height data for 3D, areal surface topography instruments, such as confocal and interference microscopes. Here we provide definitions for the reference and measurement areas of step-height specimens as well as practical measurement protocols for processing the surface topography map.

Citation Download Citation

Peter de Groot and Danette Fitzgerald "Measurement, certification and use of step-height calibration specimens in optical metrology", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032919 (26 June 2017); https://doi.org/10.1117/12.2269800

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