Cylinder stitching interferometry: with and without overlap regions

Junzheng Peng; Dingfu Chen; Yingjie Yu

doi:10.1117/12.2270910

13 June 2017 Cylinder stitching interferometry: with and without overlap regions

Junzheng Peng, Dingfu Chen, Yingjie Yu

Proceedings Volume 10449, Fifth International Conference on Optical and Photonics Engineering; 1044932 (2017) https://doi.org/10.1117/12.2270910
Event: Fifth International Conference on Optical and Photonics Engineering, 2017, Singapore, Singapore

Abstract

Since the cylinder surface is closed and periodic in the azimuthal direction, existing stitching methods cannot be used to yield the 360° form map. To address this problem, this paper presents two methods for stitching interferometry of cylinder: one requires overlap regions, and the other does not need the overlap regions. For the former, we use the first order approximation of cylindrical coordinate transformation to build the stitching model. With it, the relative parameters between the adjacent sub-apertures can be calculated by the stitching model. For the latter, a set of orthogonal polynomials, termed Legendre Fourier (LF) polynomials, was developed. With these polynomials, individual sub-aperture data can be expanded as composition of inherent form of partial cylinder surface and additional misalignment parameters. Then the 360° form map can be acquired by simultaneously fitting all sub-aperture data with LF polynomials. Finally the two proposed methods are compared under various conditions. The merits and drawbacks of each stitching method are consequently revealed to provide suggestion in acquisition of 360° form map for a precision cylinder.

Citation Download Citation

Junzheng Peng, Dingfu Chen, and Yingjie Yu "Cylinder stitching interferometry: with and without overlap regions", Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 1044932 (13 June 2017); https://doi.org/10.1117/12.2270910

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KEYWORDS

Stitching interferometry

3D acquisition

3D metrology

Data acquisition

Dimensional metrology

Inspection

Optical metrology

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