A MEMS-driven Hadamard transform spectrometer

Yu Du; Guangya Zhou

doi:10.1117/12.2292808

22 February 2018 A MEMS-driven Hadamard transform spectrometer

Yu Du, Guangya Zhou

Author Affiliations +

Proceedings Volume 10545, MOEMS and Miniaturized Systems XVII; 105450X (2018) https://doi.org/10.1117/12.2292808
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

We report a miniaturized spectrometer based on Hadamard transformation. The compact spectrometer utilizes a single-pixel photodetector and thus can operate at any wavelengths at relatively low cost. The spectrometer utilizes a MEMS-driven moving mask to encode the light intensity at its imaging slit, and the encoded light is then collected by a single-pixel detector. The light spectrum is recovered through an inverse Hadamard transform after a complete set of encoding is measured and recorded. The spectrometer is experimentally demonstrated with a spectral resolution better than 3 nm covering the full visible spectrum from 400 nm to 700 nm, and is capable of measuring over 200 spectra per second.

Citation Download Citation

Yu Du and Guangya Zhou "A MEMS-driven Hadamard transform spectrometer", Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450X (22 February 2018); https://doi.org/10.1117/12.2292808

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