Novel dual-probes atomic force microscope for line width measurements

Hequn Wang; Sitian Gao; Wei Li; Yushu Shi; Qi Li; Shi Li

doi:10.1117/12.2296489

15 November 2017 Novel dual-probes atomic force microscope for line width measurements

Hequn Wang, Sitian Gao, Wei Li, Yushu Shi, Qi Li, Shi Li

Proceedings Volume 10605, LIDAR Imaging Detection and Target Recognition 2017; 106054G (2017) https://doi.org/10.1117/12.2296489
Event: LIDAR Imaging Detection and Target Recognition 2017, 2017, Changchun, China

Abstract

Dual-probe Atomic Force Microscope (AFM) can effectively eliminate the influence of the probe size on measurement of the line width, and realize true three-dimensional measurement. Novel dual-probe AFM consists of probe system, scanning system, alignment system and displacement measurement system. As displacement measurement system, the interferometers are added to the novel dual-probes AFM. In order to simplify the dual-probe AFM structure, self-sensing tuning fork probe is used. Measurement method has two steps: the first step is to align two probes and obtain the reference point; the second step is to scan two sides of measured line by two probes separately, and calculate the line width value according to the reference point. In the alignment of two probes, the alignment method is improved by using the edge alignment and the feedback scanning alignment.

Citation Download Citation

Hequn Wang, Sitian Gao, Wei Li, Yushu Shi, Qi Li, and Shi Li "Novel dual-probes atomic force microscope for line width measurements", Proc. SPIE 10605, LIDAR Imaging Detection and Target Recognition 2017, 106054G (15 November 2017); https://doi.org/10.1117/12.2296489

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