Accurate determination of 3D PSF and resist effects in grayscale laser lithography

Temitope Onanuga; Corinna Kaspar; Holger Sailer; Andreas Erdmann

doi:10.1117/12.2326007

19 September 2018 Accurate determination of 3D PSF and resist effects in grayscale laser lithography

Temitope Onanuga, Corinna Kaspar, Holger Sailer, Andreas Erdmann

Proceedings Volume 10775, 34th European Mask and Lithography Conference; 107750I (2018) https://doi.org/10.1117/12.2326007
Event: 34th European Mask and Lithography Conference, 2018, Grenoble, France

Abstract

Accurate calibration of the optical and resist parameters is invaluable for the computation of the dose distribution needed to fabricate a desired non-binary photoresist topography. This paper presents a method for precisely evaluating the 3D point spread function (PSF) and model parameters for the resist processes in laser grayscale lithography. The 3D PSF and resist model parameters were determined by fitting a detailed model of the grayscale process to experimental measurements of an array of test patterns. Measuring the entire 3D profile provides more data for process calibration, and therefore a more accurate model. The derived model parameters were applied to correctly predict the topography of sawtooth patterns.

Citation Download Citation

Temitope Onanuga, Corinna Kaspar, Holger Sailer, and Andreas Erdmann "Accurate determination of 3D PSF and resist effects in grayscale laser lithography", Proc. SPIE 10775, 34th European Mask and Lithography Conference, 107750I (19 September 2018); https://doi.org/10.1117/12.2326007

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available