Paper
25 October 2018 Meta-Fresnel elements functioned by pixelated one-dimensional gratings with space-variant frequencies and orientations
Author Affiliations +
Abstract
By imparting local, space-variant phase changes on an incident electromagnetic wave, metasurfaces are capable of manipulating lights. These surfaces have been constructed from nanometallic optical antennas as well as high-index dielectric antennas. We introduce a unique scalable Fourier transform 4-f system that is applied to lithography. We demonstrate the experimental realization of a flexible Fresnel element, where pixelated one dimensional gratings with space-variant frequencies and orientations are assembled in low-index material as the UV resin on polyethyleneterephthalate (PET) substrate, achieving good concentration performance in the visible spectrum.
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Hong Ye, Yu Gu, Shangliang Wu, Yan Ye, and Linsen Chen "Meta-Fresnel elements functioned by pixelated one-dimensional gratings with space-variant frequencies and orientations", Proc. SPIE 10823, Nanophotonics and Micro/Nano Optics IV, 108231J (25 October 2018); https://doi.org/10.1117/12.2515584
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KEYWORDS
Fourier transforms

Lithography

Diffraction gratings

Positron emission tomography

Diffraction

Antennas

Scanning electron microscopy

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