Simulation of MSF errors using Fourier transform

Mario Pohl; Rainer Boerret; Rolf Rascher; Olga Kukso

doi:10.1117/12.2317484

7 August 2018 Simulation of MSF errors using Fourier transform

Mario Pohl, Rainer Boerret, Rolf Rascher, Olga Kukso

Proceedings Volume 10829, Fifth European Seminar on Precision Optics Manufacturing; 1082903 (2018) https://doi.org/10.1117/12.2317484
Event: Fifth European Seminar on Precision Optics Manufacturing, 2018, Teisnach, Germany

Abstract

This research is focused on the link between manufacturing parameters and the resulting mid spatial frequency error in the manufacturing process of precision optics. This first publication focuses on the parameters of the grinding step. The Goal is to understand and avoid the appearance of the mid spatial frequency error and develop a simulation which is able to predict the resulting mid spatial frequency error for/of a manufacturing process.

Citation Download Citation

Mario Pohl, Rainer Boerret, Rolf Rascher, and Olga Kukso "Simulation of MSF errors using Fourier transform", Proc. SPIE 10829, Fifth European Seminar on Precision Optics Manufacturing, 1082903 (7 August 2018); https://doi.org/10.1117/12.2317484

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