A correction method on system error in null mirror during interferometric testing

Xi Chen; Peiji Guo; Wei Wang

doi:10.1117/12.2505008

16 January 2019 A correction method on system error in null mirror during interferometric testing

Xi Chen, Peiji Guo, Wei Wang

Proceedings Volume 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 108380N (2019) https://doi.org/10.1117/12.2505008
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

The causes of the system error in null mirror during interferometric testing was analyzed. The system error in null mirror were obtained by turning the tested surface in different angles along their optic axis. The corrective file was loaded into the interferometer measurement, so as to the system error can be removed directly when testing. Therefore, with this technique, the demands on the material, manufacturing, and assembly of null mirror is not so critical, and the test accuracy is improved observably.

Citation Download Citation

Xi Chen, Peiji Guo, and Wei Wang "A correction method on system error in null mirror during interferometric testing", Proc. SPIE 10838, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 108380N (16 January 2019); https://doi.org/10.1117/12.2505008

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