Simulation prode of scanning optical focusing detection system design based on Zemax

Ying Ma; Qitai Huang

doi:10.1117/12.2506704

18 January 2019 Simulation prode of scanning optical focusing detection system design based on Zemax

Ying Ma, Qitai Huang

Proceedings Volume 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 108391M (2019) https://doi.org/10.1117/12.2506704
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

A new noncontact detection method has been proposed in order to solve the problem that the accuracy of complex freeform surface detection is not high enough and the Poor adaptability, which using optical probe with standard reflective spherical shell lens of Tyman-Green interferometer. The probe is made up by laser beam, convergent lens, diaphragm and standard reflective spherical shell lens. The laser beam is converged to a guass focus, which is overlapped with the centre of the inner surface of translucent spherical shell. Ideally, the beam is converged onto the surface of the lens and reflected to the inner surface of the spherical shell, then returned to the original path. Wave front information, when the focal point is located at a different position of the detected surface including defocus, over-focus, and ideal focus, was obtained by ZEMAX. The longitudinal positioning accuracy of the surface is discussed and proved to 100nm, which is carried out by preliminary analysis of wavefront information.

Citation Download Citation

Ying Ma and Qitai Huang "Simulation prode of scanning optical focusing detection system design based on Zemax", Proc. SPIE 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 108391M (18 January 2019); https://doi.org/10.1117/12.2506704

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KEYWORDS

Spherical lenses

Zemax

Beam splitters

Mirrors

Optical scanning systems

Aspheric lenses

Freeform optics

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