Measurement for the structure of microcosmic defects on optical surface with digital holographic microscopy

Hongzhen Jiang; Yong Liu; Xu Liu; Dong Li; Fanglan Zheng; Deqiang Yu

doi:10.1117/12.2511280

18 January 2019 Measurement for the structure of microcosmic defects on optical surface with digital holographic microscopy

Hongzhen Jiang, Yong Liu, Xu Liu, Dong Li, Fanglan Zheng, Deqiang Yu

Author Affiliations +

Proceedings Volume 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 108391U (2019) https://doi.org/10.1117/12.2511280
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

The optical surface microcosmic defects will influence the safe working of high power laser system, which is an important factor of limiting the system output energy and resulting in the damage of optics. The quantitative measurement for the three dimensional (3D) structure of microcosmic defects on macroscopic optical surface is of great importance for researching the influence of defects to the capability of high power laser system. The present structure measurement methods, such as white-light interference surface profiler and atom-force microscopy, have the disadvantages of slow measurement speed and small measurement field and therefore aren't suitable for the 3D measurement of microcosmic defects on macroscopic optical surface. In order to solve this problem, an effective approach for measuring the structure of microcosmic defects on optical surface is proposed based on digital holographic microscopy (DHM). The wavefront aberration induced by the defects is recorded and then the 3D structure of defects is calculated according to the relationship between the wavefront aberration and optical path. This approach will have potential application in the quantitative measurement for the microcosmic defects on optical surface and is helpful for the further research and understanding the influence of surface microcosmic defects on high-power laser system.

Citation Download Citation

Hongzhen Jiang, Yong Liu, Xu Liu, Dong Li, Fanglan Zheng, and Deqiang Yu "Measurement for the structure of microcosmic defects on optical surface with digital holographic microscopy", Proc. SPIE 10839, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 108391U (18 January 2019); https://doi.org/10.1117/12.2511280

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