Study on the thermal mismatch strain of CdTe/Si(211) composite substrate

Yuanzhang Wang; Yidi Geng; Lingjie Wang; Xiaoying Zhang

doi:10.1117/12.2504854

30 January 2019 Study on the thermal mismatch strain of CdTe/Si(211) composite substrate

Yuanzhang Wang, Yidi Geng, Lingjie Wang, Xiaoying Zhang

Proceedings Volume 10841, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics; 108411C (2019) https://doi.org/10.1117/12.2504854
Event: Ninth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT2018), 2018, Chengdu, China

Abstract

The distribution of thermal mismatch strain and radius of curvature of CdTe/Si(211) sample were analyzed by theoretical calculation and laser interferometer measurement at room temperature. The theoretical calculation results showed that the strain profiles and curvature radius of CdTe grew on asymmetry Si(211) surface are asymmetric along in-plane direction along [1-1-1] and [01-1]. The laser interference measurement result of the CdTe/Si(211) sample showed that the tensile strain in CdTe epilayer is smaller than the theoretical calculation. Further study showed that the plastic deformation with positive direction of surface curvature radius was formed during the high temperature deoxidation process of silicon substrate. The plastic deformation of Si substrate reduced the bending degree of CdTe/Si (211) heterostructure, so the thermal mismatch strain was also reduced.

Citation Download Citation

Yuanzhang Wang, Yidi Geng, Lingjie Wang, and Xiaoying Zhang "Study on the thermal mismatch strain of CdTe/Si(211) composite substrate", Proc. SPIE 10841, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Meta-Surface-Wave and Planar Optics, 108411C (30 January 2019); https://doi.org/10.1117/12.2504854

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KEYWORDS

Silicon

Temperature metrology

Composites

Interferometers

Thermal modeling

Mercury cadmium telluride

Statistical modeling

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