Mask lithography of 2D fluorescent magneto-photonic microstructures for biomedical and quantum applications

Amber Perry; Thi Huong Au; Duc Thien Trinh; Danh Bich Do; Stéphanie Buil; Xavier Quélin; Jean-Pierre Hermier; Ngoc Diep Lai

doi:10.1117/12.2509446

7 March 2019 Mask lithography of 2D fluorescent magneto-photonic microstructures for biomedical and quantum applications

Amber Perry, Thi Huong Au, Duc Thien Trinh, Danh Bich Do, Stéphanie Buil, Xavier Quélin, Jean-Pierre Hermier, Ngoc Diep Lai

Author Affiliations +

Proceedings Volume 10892, Colloidal Nanoparticles for Biomedical Applications XIV; 1089211 (2019) https://doi.org/10.1117/12.2509446
Event: SPIE BiOS, 2019, San Francisco, California, United States

Abstract

The use of microrobotics in biological systems has attracted much attention due to its diverse functionality and controllable motion. Combining magneto-polymer nanocomposite with fluorescent nanoparticles provides new potentials for micro-machining in biomedicine. Due to their contact-free, remote controllable, and biocompatible properties, iron oxide (Fe₃O₄) nanoparticles have been widely used in magnetic resonance imaging (MRI), cell targeting, and drug delivery, and are considered to be an attractive option in further development of micro- scale systems. The fluorescent properties and high photo-stability of semiconductor nanocrystal quantum dots (QDs) have also shown great potential for bio and quantum applications. This work explores the fabrication and manipulation of bimodel fluorescent-magnetic microstructures on a new photo-patternable composite consisting of colloidal semiconductor nanocrystal QDs (CdSe/CdS), superparamagnetic magnetite nanoparticles (Fe₃O₄), and a commercial SU-8 photoresist. Using a mask optical lithography technique, we fabricated 2D microstructures of various shapes and demonstrated their strong response to an externally applied magnetic field. Linear, rotational, and spinning movements are presented. Photo-radiation fluorescent checking was used to map the location of the QDs within the microstructures and strong fluorescent emitters were characterized. Combining Fe₃O₄ nanoparticles, QDs, and SU-8 polymer into a single complex microstructure contributes to a wide range of applications in biomedicine such as biological-labeling, in vivo cargo transportation, and micro-machining, as well as perspectives in quantum technology.

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Amber Perry, Thi Huong Au, Duc Thien Trinh, Danh Bich Do, Stéphanie Buil, Xavier Quélin, Jean-Pierre Hermier, and Ngoc Diep Lai "Mask lithography of 2D fluorescent magneto-photonic microstructures for biomedical and quantum applications", Proc. SPIE 10892, Colloidal Nanoparticles for Biomedical Applications XIV, 1089211 (7 March 2019); https://doi.org/10.1117/12.2509446

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