CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 10905 > Article
Presentation
13 March 2019 Acousto-optofluidics for high-throughput laser processing (Conference Presentation)
Marti Duocastella, Salvatore Surdo, Alberto Diaspro
Author Affiliations +
Proceedings Volume 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV; 1090508 (2019) https://doi.org/10.1117/12.2510159
Event: SPIE LASE, 2019, San Francisco, California, United States
Abstract
The inherent flexibility of laser direct writing (LDW) systems is compromised by its sequential nature and consequent sacrifice in throughput. Efforts to address this use include simultaneous multi-spot processing or the generation of multi-beam interference patterns. However, these approaches are normally limited to patterning arrayed features or uniformly distributed aperiodic patterns. Even if changing the number of beams or the angles between them enables to control the distribution and periodicity of the patterns, this task typically involves the mechanical displacement of a focusing lens or the displacement of several optical elements. Other beam shaping methods, such as a spatial light modulator, offer unparalleled flexibility, but their limited refresh rate precludes the fast control of patterns. Here, we explore the unique interactions between sound, liquids, and light to split a laser beam at microsecond timescales. By using the acoustic standing waves generated in a resonant cavity filled with a liquid, we are able to split a beam into multiple spots along two orthogonal directions, namely the X and Y axis. Notably, no Doppler shifting occurs between the diffracted beams. Thus, blocking the zeroth diffraction order can be used to generate multi-beam interference patterns, with a geometry that can be user-selected by adjusting the frequency of the acoustic wave. We provide a theoretical foundation of the working principle of our acousto-optic approach, which is in good agreement with experiments, and demonstrate the myriad of possibilities it offers by laser fabrication of patterns in both subtractive as well as additive modalities.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Marti Duocastella, Salvatore Surdo, and Alberto Diaspro "Acousto-optofluidics for high-throughput laser processing (Conference Presentation)", Proc. SPIE 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV, 1090508 (13 March 2019); https://doi.org/10.1117/12.2510159
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Laser processing
Acoustics
Liquids
Acousto-optics
Beam shaping
Beam splitters
Diffraction
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top