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4 March 2019 Designs of on-chip Fourier transform spectrometers based on semiconductor waveguides
Liang Li, Chenyu Peng, Yi Qi, Guangcan Zhou, Qifeng Qiao, Fook Siong Chau, Guangya Zhou
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Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 109310Y (2019) https://doi.org/10.1117/12.2507766
Event: SPIE OPTO, 2019, San Francisco, California, United States
Abstract
Novel concepts of on-chip Fourier transform spectrometers is proposed. The principal element in the spectrometer is semiconductor waveguide directional couplers. The optical path difference can be tuned by varying the coupling length or influencing the propagation mode of the directional coupler. Solutions of both these two methods are proposed, and the theories are verified by spectra recovering. They function well around 1.5 μm wavelength. Further enhancement can be achieved by cascading more stages of directional couplers or extending the coupling length. This design meets the requirement of small size, weight and power and may be useful in future on-chip spectroscopic sensors.
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Liang Li, Chenyu Peng, Yi Qi, Guangcan Zhou, Qifeng Qiao, Fook Siong Chau, and Guangya Zhou "Designs of on-chip Fourier transform spectrometers based on semiconductor waveguides", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 109310Y (4 March 2019); https://doi.org/10.1117/12.2507766
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KEYWORDS
Directional couplers
Waveguides
Spectrometers
Fourier transforms
Infrared spectroscopy
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