Temperature characteristics of all monolithically integrated self-scanning VCSEL array

Takashi Kondo; Masaaki Kitsunai; Shogo Komagata; Seiji Ohno; Hiroyuki Usami

doi:10.1117/12.2509433

1 March 2019 Temperature characteristics of all monolithically integrated self-scanning VCSEL array

Takashi Kondo, Masaaki Kitsunai, Shogo Komagata, Seiji Ohno, Hiroyuki Usami

Proceedings Volume 10938, Vertical-Cavity Surface-Emitting Lasers XXIII; 109380C (2019) https://doi.org/10.1117/12.2509433
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

We demonstrated all-monolithically-integrated self-scanning vertical-cavity surface-emitting laser (VCSEL) arrays whose emitters emit light individually. Each array needs only three to five bonding pads even when the number of VCSELs is over hundreds. Recently, an array with hundreds of VCSELs that lase individually is needed for some applications that do not require mechanical devices, such as MEMS and polygon mirrors. However, conventional VCSEL arrays need the same number of bonding pads, gold wires, substrate wirings, and IC driver terminals as emitters, thus taking up space and increasing application costs. We applied the self-scanning light emitting device (SLED) technology to the VCSEL array to reduce the number of bonding pads and other components mentioned above. In this paper, we discuss the temperature characteristics of the all-monolithically-integrated self-scanning VCSEL array. All layers in the epilayer structure of the array were formed at a time by MOCVD. The array consists of AlGaAs based thyristors and conventional 850 nm oxide-confined VCSELs on a p-type GaAs substrate. The array includes a transmission region, an emission region with 16 emitters, five bonding pads on the top side, and one anode electrode on the bottom of the substrate. Switching of the thyristor and lasing of the VCSEL were achieved up to 90°C. Self-scanning of the array was also possible at a temperature as high as 90°C. This is a key technology to dramatically reduce the size and cost of the chip itself and its applicable applications that require many emitters.

Citation Download Citation

Takashi Kondo, Masaaki Kitsunai, Shogo Komagata, Seiji Ohno, and Hiroyuki Usami "Temperature characteristics of all monolithically integrated self-scanning VCSEL array", Proc. SPIE 10938, Vertical-Cavity Surface-Emitting Lasers XXIII, 109380C (1 March 2019); https://doi.org/10.1117/12.2509433

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
10 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Vertical cavity surface emitting lasers

Light emitting diodes

Gallium arsenide

Printing

Diodes

Gold

Semiconductor lasers

Show All Keywords

Keywords/Phrases

Search In:

Publication Years