Parallel active cantilever AFM tool for high-throughput inspection and metrology

Mathias Holz; Christoph Reuter; Ahmad Ahmad; Alexander Reum; Tzvetan Ivanov; Elshad Guliyev; Ivo W. Rangelow; Ho-Se Lee

doi:10.1117/12.2515091

26 March 2019 Parallel active cantilever AFM tool for high-throughput inspection and metrology

Mathias Holz, Christoph Reuter, Ahmad Ahmad, Alexander Reum, Tzvetan Ivanov, Elshad Guliyev, Ivo W. Rangelow, Ho-Se Lee

Proceedings Volume 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII; 1095929 (2019) https://doi.org/10.1117/12.2515091
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

Atomic Force Microscopy (AFM) is a capable to provide high resolution CD-metrology and precise defects analysis on large wafers, masks or displays. However, AFM is not enough productive for high-throughput industrial uses. Standard single probe AFMs are showing low throughput as a serial imaging tools. The use of an array of four cantilevers as a Quattro-Array results in effective speed of 6 to 10 mm/s. An image size of 0.5mm x 0.2mm is achieved employing a piezoelectric positioner with a scan range of 200μm x 200μm and a resolution of 0.25nm (x,y) and 0.2nm (z), respectively. These capabilities are qualifying the Quattro-cantilever array system as fastest tool for. In this paper we present new results obtained with our Quattro-AFM high-throughput parallel SPM system that exhibits two key advances that are required for a successful deployment of SPM in time-efficient metrology, defect analysis and mask inspection.

Citation Download Citation

Mathias Holz, Christoph Reuter, Ahmad Ahmad, Alexander Reum, Tzvetan Ivanov, Elshad Guliyev, Ivo W. Rangelow, and Ho-Se Lee "Parallel active cantilever AFM tool for high-throughput inspection and metrology", Proc. SPIE 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII, 1095929 (26 March 2019); https://doi.org/10.1117/12.2515091

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available