In-situ measurement of aspherics with sub-aperture deflectometry for precision optical manufacturing

Xiangchao Zhang; Xueyang Xu; Zhenqi Niu; Shaoliang Li; Wanliang Zhao

doi:10.1117/12.2519828

13 May 2019 In-situ measurement of aspherics with sub-aperture deflectometry for precision optical manufacturing

Xiangchao Zhang, Xueyang Xu, Zhenqi Niu, Shaoliang Li, Wanliang Zhao

Proceedings Volume 10991, Dimensional Optical Metrology and Inspection for Practical Applications VIII; 1099105 (2019) https://doi.org/10.1117/12.2519828
Event: SPIE Defense + Commercial Sensing, 2019, Baltimore, MD, United States

Abstract

The measurement of aspheric optics has attracted intensive attention in precision engineering, and efficient in-situ measurement technologies are required urgently. Phase measuring deflectometry is a powerful measuring method for complex specular surfaces. In this paper, an in-situ measurement method is developed based on the sub-aperture deflectometry. A complete measuring procedure is developed, including initial calibration, self-adaptive calibration, route planning, imaging acquisition, phase retrieval, gradient calculation, surface reconstruction and sub-aperture stitching. Several key points concerning the sub-aperture measurement are investigated, and effective solutions are proposed to balance the measuring accuracy and aperture, to overcome the height/slope ambiguity and to eliminate the stitching errors caused by point sampling and measuring errors. The measuring flexibility and stability can be greatly improved compared to the existing SCOTS measuring approach.

Citation Download Citation

Xiangchao Zhang, Xueyang Xu, Zhenqi Niu, Shaoliang Li, and Wanliang Zhao "In-situ measurement of aspherics with sub-aperture deflectometry for precision optical manufacturing", Proc. SPIE 10991, Dimensional Optical Metrology and Inspection for Practical Applications VIII, 1099105 (13 May 2019); https://doi.org/10.1117/12.2519828

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