Planar GaAs And GaAs/A10.3GaolAs Schottky Barrier Photodiodes With High-Speed And High-Sensitivity

D. H. Lee; Sheng Li; S. J. Lee; N. G. Paulter

doi:10.1117/12.960537

14 August 1989 Planar GaAs And GaAs/A1_0.3Ga_0.7As Schottky Barrier Photodiodes With High-Speed And High-Sensitivity

D. H. Lee, Sheng Li, S. J. Lee, N. G. Paulter

Proceedings Volume 1102, Optical Technology for Microwave Applications IV; (1989) https://doi.org/10.1117/12.960537
Event: SPIE 1989 Technical Symposium on Aerospace Sensing, 1989, Orlando, FL, United States

Abstract

Planar GaAs and GaAs/A103Ga0.7As Schottky barrier photodiodes with high-speed and high-sensitivity have been fabricated and characterized. In order to improves the sensitivity of photo-diodes, surface passivation and antireflection coatings have been performed using various dielectric films, such as Si02, Si3N4, and polyimide. The internal quantum efficiency of 60% to 77% and the responsivity of 0.47 A/W to 0.6 A/W were measured for the wavelength range of 0.5 μm to 0.84 μm. A rise time of 8.5 ps and a 3-dB cutoff frequency of 42 GHz were measured for the GaAs/A10.3Ga0.7As photodiode, whereas 15 ps and 24 GHz were measured for the GaAs photodiode.

Citation Download Citation

D. H. Lee, Sheng Li, S. J. Lee, and N. G. Paulter "Planar GaAs And GaAs/A1_0.3Ga_0.7As Schottky Barrier Photodiodes With High-Speed And High-Sensitivity", Proc. SPIE 1102, Optical Technology for Microwave Applications IV, (14 August 1989); https://doi.org/10.1117/12.960537

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