Effect of the sublayer material on the formation of electrical contact and the growth rate of carbon nanotubes in a low-temperature plasma using the example of Ni/Ti/Si and Fe/W/Si structures

Viktor S. Klimin; Alexey А. Rezvan; Oleg A. Ageev

doi:10.1117/12.2522337

15 March 2019 Effect of the sublayer material on the formation of electrical contact and the growth rate of carbon nanotubes in a low-temperature plasma using the example of Ni/Ti/Si and Fe/W/Si structures

Viktor S. Klimin, Alexey А. Rezvan, Oleg A. Ageev

Author Affiliations +

Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 1102220 (2019) https://doi.org/10.1117/12.2522337
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation

Abstract

In this research, the main problems and features of the use of carbon nanotubes for devices of modern vacuum microand nanoelectronics are considered. To improve and optimize the geometric and electrical parameters of carbon nanostructures, theoretical aspects of the growth rate of carbon nanotubes on various sublayer materials, such as Ni / Ti / Si and Fe / W / Si, were considered. It was shown that with the same parameters of formation and growth of catalytic centers and carbon nanotubes on the Ni / Ti / Si and Fe / W / Si structures, arrays with different parameters were obtained. A thermodynamic analysis of the structures was carried out, which allowed us to estimate the growth rate of the structures and identify the suitability of using structures in devices.

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Viktor S. Klimin, Alexey А. Rezvan, and Oleg A. Ageev "Effect of the sublayer material on the formation of electrical contact and the growth rate of carbon nanotubes in a low-temperature plasma using the example of Ni/Ti/Si and Fe/W/Si structures", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102220 (15 March 2019); https://doi.org/10.1117/12.2522337

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