A helium mass spectrometry pressed integral leak detection technique for ultra-high vacuum devices

Min Li; Xiao-jun Yang; Ying-Ping He; Tai-Min Zhang; Feng Liu; Zhuang Miao; Bei-Bei Liu; Yao-Jin Cheng

doi:10.1117/12.2518280

12 March 2019 A helium mass spectrometry pressed integral leak detection technique for ultra-high vacuum devices

Min Li, Xiao-jun Yang, Ying-Ping He, Tai-Min Zhang, Feng Liu, Zhuang Miao, Bei-Bei Liu, Yao-Jin Cheng

Proceedings Volume 11023, Fifth Symposium on Novel Optoelectronic Detection Technology and Application; 110230C (2019) https://doi.org/10.1117/12.2518280
Event: Fifth Symposium on Novel Optoelectronic Detection Technology and Application, 2018, Xi'an, China

Abstract

Based on multi-weld seam of image intensifier tube, we have designed the leak detection platform for high vacuum electron devices, the experimental result show that Helium injection method’s minimum leakage rate is 10^-11Pa·m³/s, and pressed integration method’s minimum leakage rate less than 10^-11Pa·m³/s, and it is of positive significance to improve the life of the device.

Citation Download Citation

Min Li, Xiao-jun Yang, Ying-Ping He, Tai-Min Zhang, Feng Liu, Zhuang Miao, Bei-Bei Liu, and Yao-Jin Cheng "A helium mass spectrometry pressed integral leak detection technique for ultra-high vacuum devices", Proc. SPIE 11023, Fifth Symposium on Novel Optoelectronic Detection Technology and Application, 110230C (12 March 2019); https://doi.org/10.1117/12.2518280

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available